E28B-23747 CAPACITANCE MANOMETER WITH ETCH SENSOR

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The Type E28D Baratron is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today’s lower process pressures.
Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Type 128, 628B, and E28B Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user’s compatible power supply/readout devices.

E28B-23747