AX8407 high-flow ozone generator

The AX8407 is a high-concentration, high-flow ozone generator from MKS Instruments that converts pure oxygen to ozone by silent discharge, with a high output and high concentration levels. This generator requires only a tiny amount of doped nitrogen, much less than the level required for competitive ozone generators, and thus produces very pure ozone with very low presence of pollutants such as nitrogen oxide compounds.
The AX8407 generator is suitable for a variety of applications, including TEOS/ ozone chemical vapor deposition (CVD), Ta2O5 CVD, lithographic strips, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and atomic layer deposition (ALD) in the semiconductor industry. It is also well suited for pharmaceutical and water treatment applications, including cleaning, sterilization and disinfection, as well as Clean in place (CIP).

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Essential details：AX8407 high-flow ozone generator

Product Description

The AX8407 is a high-concentration, high-flow ozone generator from MKS Instruments that converts pure oxygen to ozone by silent discharge, with a high output and high concentration levels. This generator requires only a tiny amount of doped nitrogen, much less than the level required for competitive ozone generators, and thus produces very pure ozone with very low presence of pollutants such as nitrogen oxide compounds.
The AX8407 generator is suitable for a variety of applications, including TEOS/ ozone chemical vapor deposition (CVD), Ta2O5 CVD, lithographic strips, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and atomic layer deposition (ALD) in the semiconductor industry. It is also well suited for pharmaceutical and water treatment applications, including cleaning, sterilization and disinfection, as well as Clean in place (CIP).

AX8407

Product parameter

Ozone output: up to 335 g/Nm³ (21.7 % by weight at 5°C).
Flow range: 5-40 standard litres/minute (slm).
Intake requirements: Oxygen: Grade 6 or better O2, nitrogen: 100-1000 ppm, grade 5 or better N2.
Nominal battery pressure (delivery) : 15-45 psig (100-310 kPa).
Control interface: Front panel control and remote operation.
Cooling water temperature: 5-25 °C (41-77 °F).
Cooling water filtration: 100 microns.
Cooling water quality: resistivity ≥50 KΩ/cm.
Minimum water flow: 7.6 L/min (2.0 gal/min).
Voltage requirement: 208 VAC (±10%).
Phase: 3 Ø& ground, no neutral line.
Current requirement: 15 amps.
Frequency: 50/60 Hz.
Weight: 59 kg (130 lb).
Dimensions: 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 inches) (W x D x H).
Compliance: CE, UL/CSA and SEMI F47.

APPLICATION

Semiconductor production: For atomic layer deposition (ALD), chemical vapor deposition (CVD), photoresist strips, wafer cleaning, contaminant removal, surface conditioning, oxide growth and other processes.
Pharmaceutical industry: Used in pharmaceutical and water treatment applications for cleaning, sterilization and disinfection, as well as Clean in place (CIP).
Environmental remediation: Used for disinfection, removal of contaminants and environmental remediation.
Laboratory application: As a laboratory ozone generator, provides high purity ozone, suitable for scientific research and analysis.

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