AE ParamOunt 3013 1513 RF power delivery system

The AE ParamOunt 3013 1513 is an RF power delivery system manufactured by Advanced Energy for precise control in plasma applications.
Product features:

Full digital control: Provides precise RF control and fast response to plasma changes.
Pulse and pulse synchronization: Reduce charge accumulation, arcing, and feature distortion during etching.
Frequency tuning: 5% tuning range for fast and repeatable power delivery.
Real-time power and impedance measurement: Comparable to the accuracy of network analyzers.
Arc Management: User-optional arc management parameters and fast arc response help reduce particle contamination, feature distortion and equipment damage.

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Description

Overview

Essential details：AE ParamOunt 3013 1513 RF power delivery system

Product Description

The AE ParamOunt 3013 1513 is an RF power delivery system manufactured by Advanced Energy for precise control in plasma applications.
Product features:

Full digital control: Provides precise RF control and fast response to plasma changes.
Pulse and pulse synchronization: Reduce charge accumulation, arcing, and feature distortion during etching.
Frequency tuning: 5% tuning range for fast and repeatable power delivery.
Real-time power and impedance measurement: Comparable to the accuracy of network analyzers.
Arc Management: User-optional arc management parameters and fast arc response help reduce particle contamination, feature distortion and equipment damage.
Phase synchronization (CEX) : Allows the output waveform of the connected Paramount HF unit to be synchronized for process management.

3013 1513

Product parameter

Power output: 3kW
Frequency: 13.56MHz
Output voltage: 300VAC
Output current: 30A Max
Input voltage: 85-264VAC
Cooling method: air and water combined
Size: 133 mm (H) x 216 mm (W) x 442 mm (D) or 133 mm (H) x 483 mm (W) x 644 mm (D), depending on power level
Weight: less than 16 kg (1.5/3.0 kW) or less than 36.5 kg (6.0 kW)

APPLICATION

Application field:

Semiconductor applications: conductor and medium etching, physical vapor deposition (PVD), plasma enhanced chemical vapor deposition (PECVD).
Industrial application: Industrial film plasma process.
Service and Support:

Calibration and alignment: Advanced Energy provides tools and processes to ensure equipment continues to meet original specifications.
Field Service and field training: Field service engineers can provide installation, electrical connection, alignment verification, calibration and testing services.
PowerInsight: Turn data into actionable intelligence to increase productivity and reduce unplanned downtime through advanced analytics and machine learning.

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