Focusing on the key processes in the semiconductor process, Delta gives full play to the experience and advantages of deep industrial automation, improves the efficiency of the process equipment, optimizes the control, drive and execution level of the equipment, comprehensively improves the production quality and efficiency of the equipment, and realizes the fine and intelligent manufacturing of the semiconductor industry.

At the recently held 2023 Nanjing Semiconductor Conference, Delta demonstrated to the on-site professional audience a variety of semiconductor equipment solutions developed with industrial automation technology to help improve the production efficiency and quality of semiconductor wafers.

Through the built-in probe function of the controller, the precise control is realized quickly and synchronously, and the operation efficiency of the cleaning machine is comprehensively optimized. The equipment is seamlessly connected with the upper system to improve the intelligent level of equipment management.

193-ESM-IG-60A-E3T

Based on the powerful control performance of Delta Robot Control drive integrated machine MS series, combined with the take-up and placement arm, repeated positioning accuracy can reach ±0.01mm, fast response to the take-up and placement action of the wafer arm.

Servo drive system ASDA-A3 provides soft landing function, with micro linear motor and motion control shaft card, accurate force control, fast response, improve the detection accuracy of IC separator.

EtherCAT bus spindle card with high inertia servo motor, fast action and no oscillation; The micro linear motor force is accurate and controllable, reducing the probability of triggering collision damage.

Built-in force control and high speed and precision motion performance to meet the needs of high precision and high response; The double linear motor can drive a single axial motion to improve CT and yield.

Through the seamless integration of configuration tools and highly automated Settings, we help customers quickly import SECS/GEM standards into devices, solving problems such as a wide range of underlying devices and difficult information integration.

Based on the development of “core” and adhering to the essence of intelligent manufacturing, Delta constantly helps the semiconductor industry to carry out intelligent transformation and upgrading of equipment and production lines with innovative industrial automation technology, helps enterprises reduce costs, improve production efficiency and product quality, and promotes industrial development with the semiconductor industry!